Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss
نویسندگان
چکیده
منابع مشابه
Microfluidic channels with ultralow-loss waveguide crossings for various chip-integrated photonic sensors.
Traditional silicon waveguides are defined by waveguide trenches on either side of the high-index silicon core that leads to fluid leakage orifices for over-layed microfluidic channels. Closing the orifices needs additional fabrication steps which may include oxide deposition and planarization. We experimentally demonstrated a new type of microfluidic channel design with ultralow-loss waveguide...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2014
ISSN: 1932-5150
DOI: 10.1117/1.jmm.13.1.013002